Localized growth of carbon nanotubes via lithographic fabrication of metallic deposits

• Fan Tu,
• Martin Drost,
• Imre Szenti,
• Janos Kiss,
• Zoltan Kónya and
• Hubertus Marbach

Beilstein J. Nanotechnol. 2017, 8, 2592–2605, doi:10.3762/bjnano.8.260

• though the metal content (Co) of the latter is reduced in comparison to the Fe deposits, effective CNT growth was observed for the Co-containing deposits at lower CVD temperatures than for the corresponding Fe deposits. Keywords: autocatalytic growth; carbon nanotubes; cobalt tricarbonyl nitrosyl

• coated copper grid of 300 mesh. Two precursors were used for the fabrication of Fe and Co nanostructures: iron pentacarbonyl (Fe(CO)5) and cobalt tricarbonyl nitrosyl (Co(CO)3NO), respectively. Fe(CO)5 was purchased from ACROS organics, Co(CO)3NO was purchased from abcr GmbH & Co. KG. The quality of the

The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

• Rachel M. Thorman,
• Ragesh Kumar T. P.,
• D. Howard Fairbrother and
• Oddur Ingólfsson

Beilstein J. Nanotechnol. 2015, 6, 1904–1926, doi:10.3762/bjnano.6.194

• to previously performed gas phase and surface studies of four organometallic FEBID precursors: trimethyl(methylcyclopentadienyl)platinum(IV) (MeCpPtMe3) [15][20][21], tetrakis(trifluorophosphine)platinum(0) (Pt(PF3)4) [13][14][22][23], cobalt tricarbonyl nitrosyl (Co(CO)3NO) [10][24][25] and tungsten

• . 4.3 Cobalt tricarbonyl nitrosyl; [Co(CO)3NO] and tungsten hexacarbonyl [W(CO)6] Cobalt tricarbonyl nitrosyl [Co(CO)3NO] was initially introduced in CVD as a liquid, easy-to-handle Co source. [76][77][78]. In CVD, Crawford et al. [78] reported an average composition of CoN0.5O0.9 with only traces of

• ]. Cobalt tricarbonyl nitrosyl has a normal boiling point of 78.6 °C, a vapor pressure of 91 Torr at 20 °C [79], and a thermal decomposition temperature of about 130–140 °C measured on SiO2 [80]. It is also commercially available and relatively nontoxic. Furthermore, the commonly used Co precursor Co2(CO)8

Electron-beam induced deposition and autocatalytic decomposition of Co(CO)₃NO

• Florian Vollnhals,
• Martin Drost,
• Fan Tu,
• Esther Carrasco,
• Andreas Späth,
• Rainer H. Fink,
• Hans-Peter Steinrück and
• Hubertus Marbach

Beilstein J. Nanotechnol. 2014, 5, 1175–1185, doi:10.3762/bjnano.5.129

• observed. In addition, we show that the autocatalytic growth of nanostructures from Co(CO)3NO can also be initiated by an Fe seed layer, which presents a novel approach to the fabrication of layered nanostructures. Keywords: autocatalytic growth; cobalt tricarbonyl nitrosyl; electron-beam induced

• surfaces in a high-vacuum environment [15]. Since other precursors may show a similar behavior, we investigated one relevant candidate concerning autocatalytic growth, namely cobalt tricarbonyl nitrosyl, Co(CO)3NO, in more detail. This precursor is more stable and easier to handle than the related Co2(CO)8

• . Cobalt tricarbonyl nitrosyl was studied before concerning its ionization properties in the gas phase [20][21], the electron induced decomposition under surface science conditions in UHV [22], and the fabrication and characterization of EBID nanostructures under high vacuum conditions [23][24][25]. In the